Semiconductor Pumps

Even in this business our IWAKI pumps are world wide appreciated and used. The range contains bellow pumps, pulsation dampener and metering pumps. Wet-Bench processes, resist-saving dispensing systems, slurry applications as well as spiking are the range of application for IWAKI's specialists.

Semiconductor Pumps Features

For more details, please choose one of your product.
Series Max. capacity Max. pressure (bar) Max. stroke speed (spm)
FS
FS
100 l/min 5 240
FW/-H
FW/-H
80 l/min 4.5 120
FA
FA
40 l/min 4.5 150
CFD
CFD
240 ml/min 0.5 30
  • Category:
  • Flow/Passage l/min (50Hz)