Semiconductor Pumps

Semiconductor Pumps

Even in this business our IWAKI pumps are world wide appreciated and used. The range contains bellow pumps, pulsation dampener and metering pumps. Wet-Bench processes, resist-saving dispensing systems, slurry applications as well as spiking are the range of application for IWAKI's specialists.

Semiconductor Pumps Features

For more details, please choose one of your product.
Series Max. capacity Max. pressure (bar) Max. stroke speed (spm)
FS FS 100 l/min 5 240
FW/-H FW/-H 80 l/min 4.5 120
FA FA 40 l/min 4.5 150
CFD CFD 240 ml/min 0.5 30
  • Category:
  • Flow/Passage l/min (50Hz)