CFD

Chemical high precision replenishing pumps

• CFD_W0149-01.pdf (0.16 MB)
• Product inquiry

Features of CFD

This chemical fluid dispensing pump (CFD) is designed to handle wafer liquid of enhanced purity. Chemicals with a high vapor pressure like ammonia water and hydrogen peroxide can be also transferred.

By the use fluoro plastics a high purity and a superior chemical resistance are ensured. The stroke lenght setting in addition with the stroke rate cover a wide range. The accumulation of particles is avoided by the PFA hose connections.

Specifications (50 Hz)

Max. capacity:	8 ml/stroke
Max. pressure:	0.05 MPa
Max. stroke speed:	30 spm
Hauptmaterialien:	PTFE / PFA
Temperature range:	20 to 60°C

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• CFD_W0149-01.pdf (0.16 MB)
• Product inquiry