Chemical high precision replenishing pumps


Features of CFD

This chemical fluid dispensing pump (CFD) is designed to handle wafer liquid of enhanced purity. Chemicals with a high vapor pressure like ammonia water and hydrogen peroxide can be also transferred.

By the use fluoro plastics a high purity and a superior chemical resistance are ensured. The stroke lenght setting in addition with the stroke rate cover a wide range. The accumulation of particles is avoided by the PFA hose connections.

Specifications (50 Hz)

Max. capacity: 8 ml/stroke
Max. pressure: 0.05 MPa
Max. stroke speed: 30 spm
Hauptmaterialien: PTFE / PFA
Temperature range: 20 to 60°C

  • Category:
  • Flow/Passage l/min (50Hz)