Chemical high precision replenishing pumps
Features of CFD
This chemical fluid dispensing pump (CFD) is designed to handle wafer liquid of enhanced purity. Chemicals with a high vapor pressure like ammonia water and hydrogen peroxide can be also transferred.
By the use fluoro plastics a high purity and a superior chemical resistance are ensured. The stroke lenght setting in addition with the stroke rate cover a wide range. The accumulation of particles is avoided by the PFA hose connections.
Specifications (50 Hz)
|Max. capacity:||8 ml/stroke|
|Max. pressure:||0.05 MPa|
|Max. stroke speed:||30 spm|
|Hauptmaterialien:||PTFE / PFA|
|Temperature range:||20 to 60°C|